منابع مشابه
Reactive Oxygen Emission From Microwave Discharge Plasmas
Metastable oxygen atoms and molecules have received increased interest because of their function in surface modification, bio-decontamination and many other industrial applications, in addition to the role in the upper atmospheric layer chemistry. We review work on production and detection of metastable oxygen and we describe our experiments, including the development of techniques for measurem...
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A kinetic model for studying the time evolution of the distribution function for microwave startup is presented. The model for the distribution function is two dimensional in momentum space, but, for simplicity and rapid calculations, has no spatial dependence. Experiments on theMega Amp Spherical Tokamak have shown that the plasma current is carried mainly by electrons with energies greater th...
متن کاملSilicon etching in NF3/O2 remote microwave plasmas
The etching of silicon in remote microwave discharges fed with NF3 /O2 has been investigated. In situ ellipsometry and x-ray photoelectron spectroscopy ~XPS! were used to monitor surface effects, while mass spectrometry was used to monitor the gas phase dynamics. Varying the microwave power from 600 to 1400 W has little effect, due to the near complete dissociation of the NF3, even at lower pow...
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Microwaves are injected into argon and helium helicon plasmas at 6 to 20 mTorr neutral pressure, 1.2 kW pulsed microwave power, up to 500 W continuous RF power, and up to 1 kG magnetic fields, with the objective of heating the tail of the electron energy distribution function (EEDF) and populating ion metastable states. Langmuir probes are used to measure the EEDF and optical emission spectrosc...
متن کاملMicrowave induced plasmas as sources for atomic spectrometry
Microwave induced plasmas (MIPs) have been studied for their potential applicability as analytical sources for over 20 years. In 1965 the MIP was described as an elemental emission detector for gas chromatography (GC) by McCormack and coworkers [1]. Because of its initial low power operation of less than 100 Watts, this plasma, with He primarily as the plasma gas, has been most successfully app...
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ژورنال
عنوان ژورنال: Analytical Chemistry
سال: 2000
ISSN: 0003-2700,1520-6882
DOI: 10.1021/ac002711l